Shielded probe systems

Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The prob...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Storm, Christopher Anthony, Negishi, Kazuki, Ingram-Goble, Robbie, Simmons, Michael E, Frankel, Joseph George, Bolt, Bryan Conrad
Format: Patent
Sprache:eng
Schlagworte:
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