Charged particle beam apparatus and vibration damper for charged particle beam apparatus

There is proposed a column supporting structure that includes a viscoelastic sheet, a supporting plate which holds the viscoelastic sheet, and a fixation portion which connects the supporting plate to each lens barrel. The viscoelastic sheet is disposed to extend in a plane perpendicular to one lens...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Niibori, Tetsuya, Fukushima, Yoshimasa, Takahashi, Motohiro, Onuki, Katsunori
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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