Substrate cleaning apparatus

A substrate cleaning apparatus for removing particles adhered to a substrate includes a cleaning chamber for cleaning a substrate under a vacuum atmosphere, a mounting unit, provided in the cleaning chamber, for mounting the substrate thereon. The substrate cleaning apparatus further includes a nozz...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Inai, Kensuke, Dobashi, Kazuya
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COFFEE MILLS DOMESTIC ARTICLES OR APPLIANCES DOMESTIC WASHING OR CLEANING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FURNITURE HUMAN NECESSITIES SEMICONDUCTOR DEVICES SPICE MILLS SUCTION CLEANERS IN GENERAL
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