Ion milling device

An ion milling device of the present invention is provided with a tilt stage (8) which is disposed in a vacuum chamber (15) and has a tilt axis parallel to a first axis orthogonal to an ion beam, a drive mechanism (9, 51) which has a rotation axis and a tilt axis parallel to a second axis orthogonal...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Iwaya, Toru, Kaneko, Asako, Muto, Hirobumi, Takasu, Hisayuki, Kamino, Atsushi
Format: Patent
Sprache:eng
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