Device for contactless introduction of doping element and/or ADDITIONAL alloy to the furnace for growing multi-crystalline silicon to charge and/or the melt

Device for contactless introduction of doping element and/or additional alloy to the furnace for growing multi-crystalline silicon to charge and/or the melt that includes a tube for supply of doping element and/or the alloy that is fixed to the side surface of the inspection port of the furnace or t...

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Hauptverfasser: Berinhov Serhii Borysovych, Vlasenko Timur Viktorovych, Buchovska Iryna Bohdanivna, Tioschyn Volodymyr Viktorovych, Liaskovskyi Oleksandr Anatoliiovych
Format: Patent
Sprache:eng ; rus ; ukr
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