DEVICE FOR SPUTTERING MATERIAL

A device for sputtering material comprises two drives and two drive shaft, a lever, two disc cutters in the form of a truncated cone. To one of the drive shafts a cutter is rigidly attached, which smaller diameter is installed with a gap in a groove made at the end of smaller diameter of the second...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SYCHOV YURII IVANOVYCH, TARASIUK ANATOLII PETROVYCH, SAMCHUK VOLODYMYR VOLODYMYROVYCH, LIAKH BENHARD HRYHOROVYCH
Format: Patent
Sprache:eng ; rus ; ukr
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