A METHOD FOR MANUFACTURING A HEAT-SENSITIVE VANADIUM OXIDE FILM FOR UNCOOLED BOLOMETERS

A method for manufacturing a polycrystalline thermosensitive vanadium oxide film for uncooled microbolometers includes the magnetron deposition of VOX films with x

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Bibliographische Detailangaben
Hauptverfasser:	Liubchenko Oleksii Ihorovych, Kulbachynskyi Oleksandr Anatoliiovych, Dubikovskyi Oleksandr Volodymyrovych, Melnyk Viktor Pavlovych, Romaniuk Borys Mykolaiovych, Hudymenko Oleksandr Yosypovych, Sabov Tomash Marianovych, Kladko Vasyl Petrovych, Kosulia Oleksandr Valeriiovych
Format:	Patent
Sprache:	eng ; ukr
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A method for manufacturing a polycrystalline thermosensitive vanadium oxide film for uncooled microbolometers includes the magnetron deposition of VOX films with x