A vacuum sealing equipment

The present invention discloses a vacuum sealing equipment disposed on the surface of a chamber, the chamber including at least one hole for providing an electromagnetic wave power input from the outside of the chamber to the inside of the chamber, including: a waveguide transmission component, arra...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YU, TSUNGIH, YANG, TUNGIEH, WENG, MIN-HANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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