A vacuum sealing equipment

The present invention discloses a vacuum sealing equipment disposed on the surface of a chamber, the chamber including at least one hole for providing an electromagnetic wave power input from the outside of the chamber to the inside of the chamber, including: a waveguide transmission component, arra...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YU, TSUNGIH, YANG, TUNGIEH, WENG, MIN-HANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention discloses a vacuum sealing equipment disposed on the surface of a chamber, the chamber including at least one hole for providing an electromagnetic wave power input from the outside of the chamber to the inside of the chamber, including: a waveguide transmission component, arranged outside the hole of the chamber; a gasket is arranged inside the chamber of the chamber to contact the chamber; a low-loss substrate disposed adjacent to the spacer; an airtight component is an annular structure, arranged between the gasket and the low-loss substrate Inside, it is used to assist the airtightness between the gasket and the low-loss substrate; a flange is arranged inside the hole of the chamber, set adjacent to low loss substrate, to form a structure for fixing the low-loss substrate; and a fixing screw, which is used to fix the flange, the low-loss substrate, the airtight component and the gasket inside the chamber, and the waveguide transmission component is fixed outside the chamber to ensure