Integrated measurement system

A measurement system is presented configured for integration with a processing equipment for applying optical measurements to a structure. The measurement system comprises: a support assembly for holding a structure under measurements in a measurement plane, configured and operable for rotation in a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DOTAN, ELAD, VANHOTSKER, MOSHE, SHULMAN, BENIAMIN, BASSAN, SHAHAR, DEICH, VALERY, BAR ON, YOSI, YALOV, SHIMON, RINGEL, ROI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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