Semiconductor wafer analyzing system

The present creation provides a wafer analyzing system, comprising: a conveyor device and a defect analyzing device, wherein the defect analyzing device comprises: an image capturing module and a processing module electrically connected with the image capturing module. The conveyor device delivers a...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	LUOH, LEH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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