Detector inspection device, detector assembly, detector array, apparatus, and method

The embodiments of the present disclosure provides a detector inspection device for interrogating at least part of a detector comprised in a charged particle-optical assessment apparatus, the detector inspection device comprising: a coupler configured to be positioned proximate to a detector element...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LOOIJE, ALEXIUS OTTO, MARISSEN, ROELOF ALBERT, VAN T VEEN, GRETCHEN RENEE, VAN LEEUWEN, RICHARD MICHEL, SEEKLES, DUIJE, STEENSTRA, HERRE TJERK, WIELAND, MARCO JAN-JACO, VISSER, ERWIN ROBERT ALEXANDER, RODRIGUES MANSANO, ANDRE LUIS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY PICTORIAL COMMUNICATION, e.g. TELEVISION
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