Detector inspection device, detector assembly, detector array, apparatus, and method
The embodiments of the present disclosure provides a detector inspection device for interrogating at least part of a detector comprised in a charged particle-optical assessment apparatus, the detector inspection device comprising: a coupler configured to be positioned proximate to a detector element...
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| creator | LOOIJE, ALEXIUS OTTO MARISSEN, ROELOF ALBERT VAN T VEEN, GRETCHEN RENEE VAN LEEUWEN, RICHARD MICHEL SEEKLES, DUIJE STEENSTRA, HERRE TJERK WIELAND, MARCO JAN-JACO VISSER, ERWIN ROBERT ALEXANDER RODRIGUES MANSANO, ANDRE LUIS |
| description | The embodiments of the present disclosure provides a detector inspection device for interrogating at least part of a detector comprised in a charged particle-optical assessment apparatus, the detector inspection device comprising: a coupler configured to be positioned proximate to a detector element of a detector; and a device controller configured to apply a stimulating signal to the coupler to stimulate a response signal in the detector for interrogating at least part of the detector. |
| format | Patent |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY PICTORIAL COMMUNICATION, e.g. TELEVISION |
| title | Detector inspection device, detector assembly, detector array, apparatus, and method |
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