Wafer defect detection device

A wafer defect detection device is adapted for detecting a sample to be tested including two detection features. The wafer defect detection device includes a stage, a light source module and an image sensor device. The stage is adapted for holding the sample to be tested. The light source module is...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HWANG, YIIA, LIN, CHING-LIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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