Semiconductor devices

A semiconductor device may include a substrate including a recess, a gate insulation layer on a surface of the recess, an impurity barrier layer on a surface of the gate insulation layer to cover the surface of the gate insulation layer, a first gate pattern on impurity barrier layer to fill a lower...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WE, JUHYUNG, YOON, SUNGMI, KIM, JOOYUB, KIM, DAEHYUN, IM, DONGHYUN, CHUNG, CHUNHYUNG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!