Excimer laser with uniform beam

Fine-structure in the transverse mode of an excimer laser beam is minimized by having a plurality of resonator mirrors located at each end of a linear excimer laser. At one end, a highly-reflective end mirror and a partially-reflective end mirror are inclined at small angle with respect to each othe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN DER WILT, PAUL, MISYURYAEV, TIMUR, BRAGIN, IGOR
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
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