Ion source and extraction plate

An ion source having an extraction plate with a variable thickness is disclosed. The extraction plate has a protrusion on its interior or exterior surface proximate the extraction aperture. The protrusion increases the thickness of the extraction aperture in certain regions. This increases the loss...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WRIGHT, GRAHAM, LIKHANSKII, ALEXANDRE, KOO, BON-WOONG, SCHEUER, JAY T, KURUNCZI, PETER F, LINDBERG, ROBERT C, PEREL, ALEXANDER S
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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