TWI843197B

An optical system for a shape measuring device of the present invention includes a parallel light irradiation system and an imaging optical system, in which the parallel light irradiation system includes a point light source, a collimator lens, and a telecentric lens having a both side or object sid...

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Hauptverfasser:	KAWARADA, TAKAO, FURUTA, YOHEI, NISHIYAMA, KOHEI
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES TESTING
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creator	KAWARADA, TAKAO FURUTA, YOHEI NISHIYAMA, KOHEI
description	An optical system for a shape measuring device of the present invention includes a parallel light irradiation system and an imaging optical system, in which the parallel light irradiation system includes a point light source, a collimator lens, and a telecentric lens having a both side or object side telecentric structure to be irradiated with light from the collimator lens through an object to be measured, the imaging optical system includes an image sensor onto which an image of a portion of the object to be measured, the image by light passing through the telecentric lens is projected, and the point light source includes an LED, a diffusion member that diffuses and emits light from the LED; and a pinhole member having a pinhole into which light from the diffusion member is incident.
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subjects	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES TESTING
title	TWI843197B
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