Vented susceptor

A susceptor can include a generally circular shape and may include an inner and outer susceptor. The outer susceptor can include a support region having one or more support mechanisms as well as a channel region extending from the region boundary to an outer radial boundary radially inward of an out...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BIAN, DAKAI, ROKKAM, UDAY KIRAN, KIM, SAM, RATHI, SAKET
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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