Seal for use in a vacuum pump, seal system for use in a vacuum pump, vacuum pump, and method for enhancing the chemical resistance of a seal system for use in a vacuum pump
A seal for use in a vacuum pump comprises a seal element positioned between inner and outer seal carriers located at the inner and outer surfaces of the seal element. Each of the seal element and carriers is substantially toroidal in shape. The outer carrier comprises retention means to hold the sea...
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Format: | Patent |
Sprache: | chi ; eng |
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