Probe

An objective of the present invention is to provide a probe having a cantilever structure, in which damages caused by inspection of subject to be inspected are suppressed. A probe of the present invention includes an arm tip portion having a cantilever structure which has a first arm and a second ar...

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Hauptverfasser:	SAITO, HIROKI, AKAHIRA, MEGUMI, DEWA, HARUTADA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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creator	SAITO, HIROKI AKAHIRA, MEGUMI DEWA, HARUTADA
description	An objective of the present invention is to provide a probe having a cantilever structure, in which damages caused by inspection of subject to be inspected are suppressed. A probe of the present invention includes an arm tip portion having a cantilever structure which has a first arm and a second arm arranged in parallel and separated from each other between a fixed end and a free end, an arm body portion having a first end portion to which the fixed end is connected, and a support body connected with a second end portion of the arm body portion. The second arm includes a portion having a thickness, which is the thickness along an arrangement direction in that the first arm and the second arm are arranged, gradually decreases from the fixed end to the tree end.
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subjects	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
title	Probe
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