System for transferring fluids and method for forming a tube

Apparatuses, systems, and methods for transferring fluid to a stage in a charged particle beam system are disclosed. In some embodiments, a stage may be configured to secure a wafer; a chamber may be configured to house the stage; and a tube may be provided within the chamber to transfer fluid betwe...

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Hauptverfasser:	VAN DE KERKHOF, MARCUS ADRIANUS, ZHANG, JING, VAN HEUMEN, MARTIJN PETRUS CHRISTIANUS, FU, SHAO-WEI, SHARMA, VINEET, BRUURS, PATRIEK ADRIANUS ALPHONSUS MARIA, JACOBS, JOHANNES ANDREAS HENRICUS MARIA, SEFA, MAKFIR, SCOLARI, SIMONE MARIA, WANG, ERHENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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