TWI818614B

TWI818614B

Provided are a manufacturing apparatus and a manufacturing method for semiconductor devices. The manufacturing apparatus for semiconductor devices includes: a capillary tube which is a tool for performing a predetermined treatment on a work-piece and which is movable relative to the work-piece; an o...

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Hauptverfasser: HAYATA, SHIGERU, KAKUTANI, OSAMU
Format: Patent
Sprache:chi
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator HAYATA, SHIGERU
KAKUTANI, OSAMU
description Provided are a manufacturing apparatus and a manufacturing method for semiconductor devices. The manufacturing apparatus for semiconductor devices includes: a capillary tube which is a tool for performing a predetermined treatment on a work-piece and which is movable relative to the work-piece; an optical mechanism that moves together with the capillary tube; and a controller. The optical mechanism includes a first imaging unit and a second imaging unit. The first imaging unit is provided for acquiring a first image obtained by capturing a reference point configured within an imaging range. The second imaging unit is provided for acquiring a second image obtained by capturing a reference point formed at a predetermined interval from the capillary tube. The controller performs positioning of the capillary tube with respect to the work-piece on the basis of the first image, and calculates a correction amount for positioning of the capillary tube on the basis of the second image.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title TWI818614B
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