Sensor assembly and disk assembly
Various example embodiments described herein relate to a sensor assembly. The sensor assembly includes a substrate and a disk for providing parallel gas flow to a plurality of sensing dies. The substrate defines a plurality of openings and an inlet conduit. The plurality of openings is adapted to re...
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| creator | HUR, SANG HOON UNG, CHANGYOUNG CHO, JINKWANG |
| description | Various example embodiments described herein relate to a sensor assembly. The sensor assembly includes a substrate and a disk for providing parallel gas flow to a plurality of sensing dies. The substrate defines a plurality of openings and an inlet conduit. The plurality of openings is adapted to receive at least one sensing die of the plurality of sensing dies. The inlet conduit is defined between a first end of the substrate and a second end of the substrate. The first end of the substrate is adapted to receive an inflow of a gas. The disk is adapted to be positioned below the substrate so that a top portion of the disk is exposed to the second end of the inlet conduit and the disk defines a passage for the gas to uniformly flow from the second end to a sensor head of the at least one sensing die. |
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The substrate defines a plurality of openings and an inlet conduit. The plurality of openings is adapted to receive at least one sensing die of the plurality of sensing dies. The inlet conduit is defined between a first end of the substrate and a second end of the substrate. The first end of the substrate is adapted to receive an inflow of a gas. 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The sensor assembly includes a substrate and a disk for providing parallel gas flow to a plurality of sensing dies. The substrate defines a plurality of openings and an inlet conduit. The plurality of openings is adapted to receive at least one sensing die of the plurality of sensing dies. The inlet conduit is defined between a first end of the substrate and a second end of the substrate. The first end of the substrate is adapted to receive an inflow of a gas. The disk is adapted to be positioned below the substrate so that a top portion of the disk is exposed to the second end of the inlet conduit and the disk defines a passage for the gas to uniformly flow from the second end to a sensor head of the at least one sensing die.</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| title | Sensor assembly and disk assembly |
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