Method for determining a stochastic metric relating to a lithographic process

A method of determining a stochastic metric, the method including: obtaining a trained model having been trained to correlate training optical metrology data to training stochastic metric data, wherein the training optical metrology data includes a plurality of measurement signals relating to distri...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BATISTAKIS, CHRYSOSTOMOS, RUTIGLIANI, VITO DANIELE, PISARENCO, MAXIM, VERSCHUREN, COEN ADRIANUS, VAN KRAAIJ, MARKUS GERARDUS MARTINUS MARIA, GEYPEN, NIELS, MIDDLEBROOKS, SCOTT ANDERSON
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CALCULATING COLORIMETRY COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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