Method for determining a stochastic metric relating to a lithographic process
A method of determining a stochastic metric, the method including: obtaining a trained model having been trained to correlate training optical metrology data to training stochastic metric data, wherein the training optical metrology data includes a plurality of measurement signals relating to distri...
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| creator | BATISTAKIS, CHRYSOSTOMOS RUTIGLIANI, VITO DANIELE PISARENCO, MAXIM VERSCHUREN, COEN ADRIANUS VAN KRAAIJ, MARKUS GERARDUS MARTINUS MARIA GEYPEN, NIELS MIDDLEBROOKS, SCOTT ANDERSON |
| description | A method of determining a stochastic metric, the method including: obtaining a trained model having been trained to correlate training optical metrology data to training stochastic metric data, wherein the training optical metrology data includes a plurality of measurement signals relating to distributions of an intensity related parameter across a zero or higher order of diffraction of radiation scattered from a plurality of training structures, and the training stochastic metric data includes stochastic metric values relating to the plurality of training structures, wherein the plurality of training structures have been formed with a variation in one or more dimensions on which the stochastic metric is dependent; obtaining optical metrology data including a distribution of the intensity related parameter across a zero or higher order of diffraction of radiation scattered from a structure; and using the trained model to infer a value of the stochastic metric from the optical metrology data. |
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| subjects | CALCULATING COLORIMETRY COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING |
| title | Method for determining a stochastic metric relating to a lithographic process |
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