Suction clamp, object handler, stage apparatus and lithographic apparatus

The invention provides a suction clamp for clamping an object. The suction clamp comprises a base structure comprising a base and a connection area, and a first pad for receiving the object. The suction clamp further comprises a resilient member connecting the first pad to the connection area of the...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KRAMER, GIJS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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