High temperature aluminum nitride heater with multi-zone capability and method of manufacturing the same

Embodiments of an electric heater apparatus are disclosed. In one embodiment, an electric heater apparatus includes: (a) a first thermally conductive layer comprising an electrically insulating material; (b) one or more electrically conductive heating elements disposed in one or more grooves arrange...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SANE, AJIT, LAL, ANNENDRA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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