TWI801670B

The capacity of a MOS capacitor is increased. A semiconductor element includes a first semiconductor region, an insulation film, a gate electrode, and a second semiconductor region. The first semiconductor region is arranged on a semiconductor substrate and has a recess on the surface. The insulatio...

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Bibliographische Detailangaben
Hauptverfasser: YAMAGUCHI, KAZUKI, KASAHARA, NORIKAZU, WATANABE, TAKASHI, TOMITA, CHIHIRO, OKAMOTO, SHINTARO, EDA, KENTARO, SUZUKI, KOHEI, HIRAI, TOMOHIRO
Format: Patent
Sprache:chi
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