SUPPLY CONTROL SYSTEM FOR A PLURALITY OF TANKS

A supply control system for a tank utilized in a semiconductor manufacturing process is disclosed. The supply control system for the tank according to an embodiment of the present disclosure includes a plurality of tanks for storing a large amount of process material used to manufacture a semiconduc...

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Hauptverfasser: JANG, SUNG-UP, SMITH, ANTHONY JOHN, KWON, HO-SAN, CHOI, YOUNG-SOO, YU, BANG-YEON, CABLE, SHAWN S, KANG, TAE-UG, YIM, SANG-JAE, KIM, YONG-TAE, LEE, SANG-KEUN, PILTZ, THOMAS WILLIAM, PREGO, JOHN PAUL, HWANG, HYO-JONG, HUGHES, CYNTHIA LEE, KIM, JIHOON
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creator JANG, SUNG-UP
SMITH, ANTHONY JOHN
KWON, HO-SAN
CHOI, YOUNG-SOO
YU, BANG-YEON
CABLE, SHAWN S
KANG, TAE-UG
YIM, SANG-JAE
KIM, YONG-TAE
LEE, SANG-KEUN
PILTZ, THOMAS WILLIAM
PREGO, JOHN PAUL
HWANG, HYO-JONG
HUGHES, CYNTHIA LEE
KIM, JIHOON
description A supply control system for a tank utilized in a semiconductor manufacturing process is disclosed. The supply control system for the tank according to an embodiment of the present disclosure includes a plurality of tanks for storing a large amount of process material used to manufacture a semiconductor; a main-supply pipe configured to communicate with sub-supply pipes respectively coupled to the plurality of tanks and to supply process material to a semiconductor manufacturing device; a plurality of flow control devices respectively included in the sub-supply pipes and configured to control a process material flow rate discharged from each of the plurality of tanks; a sensor included in the main-supply pipe and configured to measure in real time the process material flow rate and a process material supply pressure supplied from each of the plurality of tanks to the semiconductor manufacturing device; a back-up portion coupled to the main-supply pipe and configured to supplementally discharge stored process m
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language chi ; eng
recordid cdi_epo_espacenet_TWI796794BB
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES
FIXED-CAPACITY GAS-HOLDERS
HEATING
LIGHTING
MECHANICAL ENGINEERING
SEMICONDUCTOR DEVICES
STORING OF DISTRIBUTING GASES OR LIQUIDS
VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES
WEAPONS
title SUPPLY CONTROL SYSTEM FOR A PLURALITY OF TANKS
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