Integrated chip, image sensor and formation method of the image sensor

The present disclosure relates to an integrated chip including a substrate and a pixel. The pixel includes a photodetector. The photodetector is in the substrate. The integrated chip further includes a first inner trench isolation structure and an outer trench isolation structure that extend into th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHOU, KENG-YU, CHANG, CHIH-KUNG, HUANG, CHENG-YU, CHIANG, WEIIEH, WU, WEN-HAU, CHUANG, CHUN-HAO
Format: Patent
Sprache:chi ; eng
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