TWI784911B

[Problem] To achieve an increase in size and densification of a receptor substrate and shorten the tact time in a LIFT device while maintaining a high accuracy of the LIFT position. [Solution] A LIFT device is constructed with stage groups that move while holding a donor substrate with a LIFT sample...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OZAWA, Shusaku, YAMAOKA, Hiroshi, NAKADA, Satoki
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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