TWI783368B

The present disclosure proposes a diagnostic system capable of properly identifying the cause of even an error for which multiple factors or multiple compound factors may be accountable. The diagnostic system according to the present disclosure is provided with a learning device for learning at leas...

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Hauptverfasser: ISHIKAWA, MASAYOSHI, UEDA, KAZUHIRO, TAKANO, MASAMI, YOSHIDA, YASUHIRO, SASAJIMA, FUMIHIRO
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creator ISHIKAWA, MASAYOSHI
UEDA, KAZUHIRO
TAKANO, MASAMI
YOSHIDA, YASUHIRO
SASAJIMA, FUMIHIRO
description The present disclosure proposes a diagnostic system capable of properly identifying the cause of even an error for which multiple factors or multiple compound factors may be accountable. The diagnostic system according to the present disclosure is provided with a learning device for learning at least one of a recipe defining operations of an inspection device, log data describing states of the device, or specimen data describing characteristics of a specimen in association with error types of the device, and estimates the cause of the error by using the learning device (refer to FIG. 4).
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subjects BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
COMPUTING
COUNTING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
PHYSICS
title TWI783368B
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