TWI768027B

An inspection device includes a ray source that irradiates an object to be inspected with energy rays, a detection unit that detects energy rays that have passed through the object to be inspected, a displacement mechanism that sets a relative position of the object to be inspected and the ray sourc...

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Hauptverfasser: MICHIMOTO, TAKAHIRO, OHBAYASHI, TAKESHI, ZAIKE, MASAYUKI
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creator MICHIMOTO, TAKAHIRO
OHBAYASHI, TAKESHI
ZAIKE, MASAYUKI
description An inspection device includes a ray source that irradiates an object to be inspected with energy rays, a detection unit that detects energy rays that have passed through the object to be inspected, a displacement mechanism that sets a relative position of the object to be inspected and the ray source by displacing at least one of the object to be inspected and the ray source in relation to the other, an internal image generation unit that generates an internal image of the object to be inspected based on a detection amount distribution of the energy rays detected by the detection unit, and a control unit that controls the displacement mechanism based on the detection amount distribution of the energy rays detected by the detection unit.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title TWI768027B
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