TWI766981B

A coating treatment device (10) comprises: substrate movement units (12, 13) that hold a substrate and move the substrate in the horizontal direction; an oblong coating nozzle (14) that extends in a direction orthogonal to the direction of movement of the substrate movement units, and discharges a c...

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Bibliographische Detailangaben
1. Verfasser:	IKEMOTO, DAISUKE
Format:	Patent
Sprache:	chi
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS SPRAYING OR ATOMISING IN GENERAL TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING
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Beschreibung
Zusammenfassung:	A coating treatment device (10) comprises: substrate movement units (12, 13) that hold a substrate and move the substrate in the horizontal direction; an oblong coating nozzle (14) that extends in a direction orthogonal to the direction of movement of the substrate movement units, and discharges a coating liquid onto the substrate held by the substrate movement units; a coating nozzle movement unit (16) that moves the coating nozzle in the direction in which the coating nozzle extends; and a control unit (18) that controls the direction in which the substrate held by the substrate movement units is coated by controlling the movement speed of the substrate movement units and the coating nozzle movement unit.