TWI764904B
By simultaneously conducting electricity to a plurality of sputtering chambers during preliminary film formation when producing an optical film for forming a multilayer optical thin-film on a film substrate, the present invention forms a layered thin-film body of two or more different material types...
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| creator | SAKI, SATORU SHUTO, SHUNSUKE |
| description | By simultaneously conducting electricity to a plurality of sputtering chambers during preliminary film formation when producing an optical film for forming a multilayer optical thin-film on a film substrate, the present invention forms a layered thin-film body of two or more different material types on a film substrate, and calculates the film thickness of the plurality of thin-films on the basisof the optical properties obtained by an optical measurement unit (80) provided in the sputtering device. The film thickness measurement and thin-film formation conditions are repeatedly adjusted until the optical properties obtained by the optical measurement unit or the film thickness of the plurality of thin-films calculated on the basis of the optical properties falls within a prescribed range. |
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The film thickness measurement and thin-film formation conditions are repeatedly adjusted until the optical properties obtained by the optical measurement unit or the film thickness of the plurality of thin-films calculated on the basis of the optical properties falls within a prescribed range.</description><language>chi</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PHYSICS ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220521&DB=EPODOC&CC=TW&NR=I764904B$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220521&DB=EPODOC&CC=TW&NR=I764904B$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SAKI, SATORU</creatorcontrib><creatorcontrib>SHUTO, SHUNSUKE</creatorcontrib><title>TWI764904B</title><description>By simultaneously conducting electricity to a plurality of sputtering chambers during preliminary film formation when producing an optical film for forming a multilayer optical thin-film on a film substrate, the present invention forms a layered thin-film body of two or more different material types on a film substrate, and calculates the film thickness of the plurality of thin-films on the basisof the optical properties obtained by an optical measurement unit (80) provided in the sputtering device. 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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | TWI764904B |
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