System and method for inspecting objects based on polarization property

System and method for inspecting objects based on polarization property

A system for inspecting an object, the system comprises: a sensing module that comprises multiple collection paths, each collection path comprises a camera and an analyzer that defines a polarization property of the collection path; a controller that is configured to set polarization properties of t...

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Hauptverfasser: NOAM, GORDON, ITAY, COHEN, AMIR, TZHORI
Format: Patent
Sprache:chi ; eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator NOAM, GORDON
ITAY, COHEN
AMIR, TZHORI
description A system for inspecting an object, the system comprises: a sensing module that comprises multiple collection paths, each collection path comprises a camera and an analyzer that defines a polarization property of the collection path; a controller that is configured to set polarization properties of the multiple collection paths independently from each other; a beam splitter; an objective lens; an illumination module that is configured to (a) direct a bright field beam towards an area of the object at a first angular range; (b) direct a first dark field beam towards the area of the object at a second angular range; (c) direct a second dark field beam towards the area of the object at a third angular range; (d) direct, towards the sensing module, at least one specular reflectance from at least one beam out of the bright field beam, the first dark field beam and the second dark field beam.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title System and method for inspecting objects based on polarization property
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