TWI763794B
A wafer testing apparatus according to an embodiment includes a tester configured to apply electrical signals to a semiconductor device fabricated on a wafer, a prober configured to cause the semiconductor device to be electrically coupled to the tester, a tester controller configured to control an...
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| Format: | Patent |
| Sprache: | chi |
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| Zusammenfassung: | A wafer testing apparatus according to an embodiment includes a tester configured to apply electrical signals to a semiconductor device fabricated on a wafer, a prober configured to cause the semiconductor device to be electrically coupled to the tester, a tester controller configured to control an operation of the tester, and a prober controller configured to control an operation of the prober, wherein the tester controller and the prober controller communicate with each other when diagnosing a state of the tester. |
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