Assembly for supporting substrate and apparatus for processing substrate

In accordance with an exemplary embodiment of the present invention, an assembly for supporting substrate, the assembly comprising: a support frame having at least one insertion hole recessed from one surface of the support frame, the insertion hole having an inner movement hole and a screw hole pos...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM, YONG KI, SON, SUNG GYUN, SHIN, YANG SIK, LEE, SANG DON, KIM, JAE WOO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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