Probe systems for optically probing a device under test and methods of operating the probe systems

Probe systems and methods of characterizing optical coupling between an optical probe of a probe system and a calibration structure. The probe systems include a probe assembly that includes an optical probe, a support surface configured to support a substrate, and a signal generation and analysis as...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RISHAVY, DANIEL, NEGISHI, Kazuki, FRANKEL, JOSEPH GEORGE, SIMMONS, MICHAEL E, CHRISTENSON, ERIC ROBERT
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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