TWI757437B

An inspection system includes a prober, a tester and a malfunction analysis/prediction unit. The prober has a stage holding a substrate having multiple devices formed thereon, a transport unit that transfers the substrate to the stage, and a probe card that brings a plurality of probes into contact...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KAGAMI, TETSUYA
Format:	Patent
Sprache:	chi
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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