TWI742452B

An object is to enhance the durability of substrates of a probe substrate and/or the probe substrate and a member to be joined.A probe substrate according to the present disclosure includes: a plurality of electrical contactors respectively brought into electrical contact with a plurality of electro...

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Hauptverfasser: WATANABE, MAKI, ABE, SHINTARO, SUGISAWA, TAKEKI, AKINIWA, TAKASHI, OMORI, TOSHINORI, KONDO, TAKESHI, OSANAI, YASUAKI, GOTO, KAZUYA
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creator WATANABE, MAKI
ABE, SHINTARO
SUGISAWA, TAKEKI
AKINIWA, TAKASHI
OMORI, TOSHINORI
KONDO, TAKESHI
OSANAI, YASUAKI
GOTO, KAZUYA
description An object is to enhance the durability of substrates of a probe substrate and/or the probe substrate and a member to be joined.A probe substrate according to the present disclosure includes: a plurality of electrical contactors respectively brought into electrical contact with a plurality of electrode terminals of a member to be inspected, a joint portion for a member to be joined is provided on one or each of a first surface and a second surface of the probe substrate and the member to be joined is joined to the joint portion with a metal layer that includes, in a metal component, at least 70 atomic percent or more of a transition metal and that is formed by sintering, and/or in a joining surface between a plurality of substrates of the probe substrate, the substrates are joined together with the metal layer formed by sintering, in the metal layer formed by sintering, a plurality of organic component parts and/or voids formed by heating an adhesive composition including a thermoplastic resin are left and the
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recordid cdi_epo_espacenet_TWI742452BB
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subjects BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
CLADDING OR PLATING BY SOLDERING OR WELDING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MACHINE TOOLS
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
PHYSICS
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
SOLDERING OR UNSOLDERING
TESTING
TRANSPORTING
WELDING
WORKING BY LASER BEAM
title TWI742452B
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