INTERATED CIRCUIT STRUCTURES AND METHODS FOR FORMING THE SAME

An integrated circuit structure includes a bulk semiconductor region, a first semiconductor strip over and connected to the bulk semiconductor region, and a dielectric layer including silicon oxide therein. Carbon atoms are doped in the silicon oxide. The dielectric layer includes a horizontal porti...

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Bibliographische Detailangaben
Hauptverfasser: KO, CHUNGI, KAO, WAN-YI
Format: Patent
Sprache:chi ; eng
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