Heat treatment apparatus and heat treatment method

When a semiconductor wafer does not exist in a chamber, a halogen lamp is lighted. Light emitted from the halogen lamp successively transmits a lower chamber window and an upper chamber window of a quartz and is received by a spectrophotometer. The spectrophotometer measures spectrum intensity of th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUSE, KAZUHIKO, NOZAKI, YOSHIHIDE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!