Advanced in-situ particle detection system for semiconductor substrate processing systems

An FI having an in-situ particle detector and a method for particle detection therein are provided. In one aspect, the FI includes a fan, a substrate support, a particle detector, and an exhaust outlet. The fan, substrate support, and particle detector are arranged such that, in operation, the fan d...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JI, FA, ANTONIO, RALPH PETER, SMITH, PATRICK L, JAFARI, SHAWYON, OH, JANG SEOK, LU, XUESONG, ZHANG, LIN, LE, ANDREW V
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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