Surface polishing apparatus

The present invention provides a plane grinding device, and aims to prevent the damage to a cable at a static part side or a rotation part side by preventing the contact of the cable at the static part side and the rotation part or the contact of the cable at the rotation part side and the static pa...

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Hauptverfasser: ODAGIRI, SHIGERU, INOUE, YUSUKE, YOSHIHARA, HIDEAKI, KOIKE, YOSHIO
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creator ODAGIRI, SHIGERU
INOUE, YUSUKE
YOSHIHARA, HIDEAKI
KOIKE, YOSHIO
description The present invention provides a plane grinding device, and aims to prevent the damage to a cable at a static part side or a rotation part side by preventing the contact of the cable at the static part side and the rotation part or the contact of the cable at the rotation part side and the static part, thereby realizing the stable grinding processing. A first cable cover 73 and a second cable cover 74 between which a space part 75 is maintained are arranged at the positions of covering the cable 53 connected with a rotation side joint part 36 of a rotating joint 60, and the cable 53 connected with the rotation side joint part 63 is accommodated in the space part 75 between the two cable covers (73, 74).
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language chi ; eng
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subjects BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
title Surface polishing apparatus
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