Getter device for a micromechanical component
A getter device for a micromechanical component, having a metallic getter structure that is situated in a cavity of the micromechanical component. The getter structure is heatable using a defined electric current. It is possible to evaporate the material of the getter structure in a defined manner.
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| creator | GECKELER, CARSTEN GUENTHER, SEBASTIAN SCHITTENHELM, NICOLE |
| description | A getter device for a micromechanical component, having a metallic getter structure that is situated in a cavity of the micromechanical component. The getter structure is heatable using a defined electric current. It is possible to evaporate the material of the getter structure in a defined manner. |
| format | Patent |
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| language | chi ; eng |
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| subjects | BLASTING COMBUSTION ENGINES CONTROLLING COMBUSTION ENGINES HEATING HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT LIGHTING MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MECHANICAL ENGINEERING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING WEAPONS |
| title | Getter device for a micromechanical component |
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