TWI685046B

The present invention comprises: a stage (20) that includes a suction surface (22) that suctions a sheet (12); a push-up member (30) that pushes up the sheet (12); and a three-way valve (67) that switches the opening pressure of an opening (23) between a first pressure that is near a vacuum and a se...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NAGANO, KAZUAKI
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINED OPERATIONS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR OTHER WORKING OF METAL PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING UNIVERSAL MACHINE TOOLS
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