Substrate monitoring apparatus and substrate monitoring method

This substrate monitoring device is provided with: an imaging unit (27) having a prescribed imaging range; an arranging unit (26a) which arranges the substrate (S) within the imaging range; an irradiation unit (29) which irradiates the substrate (Sc(Se1)) arranged in the imaging range with a laser b...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OHNO, TETSUHIRO, HIGASHI, MOTOTSUGU, SAKAUE, HIROTOSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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