Drehratensensor und verfahren zum betrieb eines drehratensensors

A rotation rate sensor includes a substrate having a main extension plane and a Coriolis element, in which the rotation rate sensor is configured so that the Coriolis element is excitable with the aid of an excitation arrangement to carry out an excitation oscillation along a first direction and in...

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Hauptverfasser: ZEHRINGER, STEFAN, PRUETZ, ODD-AXEL
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creator ZEHRINGER, STEFAN
PRUETZ, ODD-AXEL
description A rotation rate sensor includes a substrate having a main extension plane and a Coriolis element, in which the rotation rate sensor is configured so that the Coriolis element is excitable with the aid of an excitation arrangement to carry out an excitation oscillation along a first direction and in parallel to the main extension plane, the rotation rate sensor including a compensation element for exerting a compensation force, the compensation force having a non-linear dependence on the excitation oscillation.
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language chi ; eng
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subjects GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
NAVIGATION
PERFORMING OPERATIONS
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
TRANSPORTING
title Drehratensensor und verfahren zum betrieb eines drehratensensors
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